| Identification | More | [Name]
Tungsten hexafluoride | [CAS]
7783-82-6 | [Synonyms]
Tungstenfluoride
TUNGSTEN HEXAFLUORIDE
TUNGSTEN(VI) FLUORIDE
(oc-6-11)-tungstenfluoride(wf6
Hexafluorotungsten
Tungsten fluoride (WF6)
Tungsten fluoride (WF6), (OC-6-11)-
WF6
TUNGSTEN(VI) FLUORIDE CYL. WITH 450 G
TUNGSTEN(VI) FLUORIDE, 99.9+%
TUNGSTEN (VI) FLUORIDE (99.9+%-W)
Tungsten hexafluoride 99%
Tungstenhexafluoride99%
(oc-6-11)-tungsten fluoride
Wolfram(VI)hexafluoride | [EINECS(EC#)]
232-029-1 | [Molecular Formula]
F6W | [MDL Number]
MFCD00040536 | [Molecular Weight]
297.83 | [MOL File]
7783-82-6.mol |
| Safety Data | Back Directory | [Hazard Codes ]
T,C | [Risk Statements ]
R23/24/25:Toxic by inhalation, in contact with skin and if swallowed .
R34:Causes burns. | [Safety Statements ]
S26:In case of contact with eyes, rinse immediately with plenty of water and seek medical advice .
S36/37/39:Wear suitable protective clothing, gloves and eye/face protection .
S45:In case of accident or if you feel unwell, seek medical advice immediately (show label where possible) . | [RIDADR ]
UN 2196 2.3
| [WGK Germany ]
3
| [RTECS ]
YO7720000
| [Hazard Note ]
Toxic/Corrosive | [HazardClass ]
2.3 | [HS Code ]
2826199090 | [Safety Profile]
A poison and corrosive
liquid or gas. | [Hazardous Substances Data]
7783-82-6(Hazardous Substances Data) |
| Hazard Information | Back Directory | [General Description]
A toxic corrosive light yellow liquid or gas. Boiling point 67°F. Melting point 37°F. Noncombustible. Used in the manufacture of other chemicals and in the manufacture of electronics. | [Reactivity Profile]
TUNGSTEN HEXAFLUORIDE(7783-82-6) emits very toxic and irritating fumes containing metallic tungsten and tungsten fluorides when heated to decomposition. Reacts violently with tetramethoxysilane [Jacob, E., Angew. Chem., 1982, 21, p. 143]. | [Air & Water Reactions]
Decomposes in water giving hydrofluoric acid, another corrosive material. | [Health Hazard]
TOXIC; may be fatal if inhaled, ingested or absorbed through skin. Vapors are extremely irritating and corrosive. Contact with gas or liquefied gas may cause burns, severe injury and/or frostbite. Fire will produce irritating, corrosive and/or toxic gases. Runoff from fire control may cause pollution. | [Potential Exposure]
A strong halogenating agent. Used to
apply tungsten coatings to other surfaces by vapor deposition
process; making electronics and components; in the
manufacture of other chemicals. | [Fire Hazard]
Some may burn but none ignite readily. Vapors from liquefied gas are initially heavier than air and spread along ground. Some of these materials may react violently with water. Cylinders exposed to fire may vent and release toxic and/or corrosive gas through pressure relief devices. Containers may explode when heated. Ruptured cylinders may rocket. | [First aid]
If this chemical gets into the eyes, remove any
contact lenses at once and irrigate immediately for at least
15 minutes, occasionally lifting upper and lower lids. Seek
medical attention immediately. If this chemical contacts the
skin, remove contaminated clothing and wash immediately
with soap and water. Seek medical attention immediately. If
this chemical has been inhaled, remove from exposure, begin
rescue breathing (using universal precautions, including
resuscitation mask) if breathing has stopped and CPR if heart
action has stopped. Transfer promptly to a medical facility.
When this chemical has been swallowed, get medical attention.
Give large quantities of water and induce vomiting. Do
not make an unconscious person vomit. Medical observation
is recommended for 24-48 hours after breathing overexposure,
as pulmonary edema may be delayed. As first aid for
pulmonary edema, a doctor or authorized paramedic may
consider administering a drug or other inhalation therapy. If
frostbite has occurred, seek medical attention immediately;
do NOT rub the affected areas or flush them with water. In
order to prevent further tissue damage, do NOT attempt to
remove frozen clothing from frostbitten areas. If frostbite has
NOT occurred, immediately and thoroughly wash contaminated
skin with soap and water. | [Shipping]
UN2196 Tungsten hexafluoride, Hazard Class:
2.3; Labels: 2.3-Poisonous gas, 8-Corrosive material,
Inhalation Hazard Zone B. Cylinders must be transported
in a secure upright position, in a well-ventilated truck.
Protect cylinder and labels from physical damage. The
owner of the compressed gas cylinder is the only entity
allowed by federal law (49CFR) to transport and refill
them. It is a violation of transportation regulations to refill
compressed gas cylinders without the express written permission
of the owner. | [Incompatibilities]
Decomposes on contact with water and
moist air, forming highly corrosive hydrofluoric acid.
Violent reaction on contact with methyl silicate. | [Description]
Tungsten(VI) fluoride, also known as tungsten hexafluoride, WF6, is a toxic, corrosive, colorless gas, with a density of
about 13 g/L (roughly 11 times heavier than air). It is one of the densest gases known under standard conditions. WF6 is
frequently used by the semiconductor industry to form tungsten films, through CVD. The WF6 molecule is octahedral with
the symmetry point group of Oh. The W-F bond distances are 183.2 pm. Between 2.3℃ and 17℃, tungsten hexafluoride
condenses into a pale-yellow liquid with a density of 3.44 g/cm3 at 15℃. At 2.3℃ it freezes into a white solid with a cubic
crystalline structure, with lattice constant of 628 pm and a calculated density of 3.99 g/cm3
. At 29℃ this structure converts to an orthorhombic solid with lattice constants of a = 960.3 pm, b = 871.3 pm, and c = 504.4 pm and a density of
4.56 g/cm3
. In this phase, the W-F distance is 181 pm, and the mean closest intermolecular contacts are 312 pm. | [Chemical Properties]
Colorless gas or light-yellow liquid.
| [Chemical Properties]
Tungsten hexafluoride is a toxic, colorless gas
or a light yellow liquid. | [Waste Disposal]
Return refillable compressed
gas cylinders to supplier. Nonrefillable cylinders should be
disposed of in accordance with local, state and federal regulations.
Allow remaining gas to vent slowly into atmosphere
in an unconfined area or exhaust hood. Refillabletype
cylinders should be returned to original supplier with
any valve caps and outlet plugs secured and valve protection
caps in place. | [Uses]
In the electronics industry as a source of tungsten metal that connects the aluminum layers within semiconductor devices. | [Synthesis]
WF6 is usually produced by the exothermic reaction of F2 gas with tungsten powder between 350℃ and 400℃.
W +3F2→WF6 |
| Questions And Answer | Back Directory | [Physical and Chemical Properties]
Chemical formula is WF6. The molecular weight is 297.84. It is colorless gas or light yellow liquid. It has strong irritant. It is poisonous, its toxicity is similar with fluorine. When the temperature is very low, it is white solid. It is soluble in organic solvents and then generate a special color. When meet water, it can decompose. In the air, it can decompose with strong smoke by moisture, and generate yellow tungstate or tungsten trioxide. Chemical properties is lively. And almost all metals (except gold and platinum) can react with it. It is also corrosive for nickel, monel and stainless steel, but Ni and stainless steel have resistance for corrosion. When dry, it is less corrosive to glass, while in moisture, it is able to react quickly. It can react strong with gaseous ammonia. Ammonia or an alkali can absorb it . It can generate double salt with alkali metal fluoride. It is soluble in benzene and other organic solvents.
[Density] 3.44×103kg/m3 (15℃, liquid)
[Melting point] 2.5℃ (5.6 × 104 Pa)
[Boiling point] 17.5℃
[Critical temperature] 171℃
[Critical pressure] 445.8kPa
[Preparation method] Metal tungsten powder and elemental fluorine can react to synthesize it directly.
[Application] (1) It is strong fluorinating agent, it can synthesize tungsten film in vapor deposition method. (2) it is used in the microelectronics industry for chemical vapor deposited tungsten silicide or tungsten, to produce a low resistance, a high melting point interconnects.
Figure 1 shows the molecular structure of tungsten hexafluoride.
| [Hazardous characteristics]
When meet moisture, air or water, it will decompose and emit toxic and corrosive hydrogen fluoride fumes. It can cause very serious burns for skin, eyes, mucous membranes. When high concentrations expose, it can cause nausea, vomiting, abdominal pain, convulsions, kidney damage.
The above information is edited by the chemicalbook of Wang Xiaodong. | [Storage Instructions]
It shoud be packed in special cylinders and stored in a cool, ventilated coffers. Avoid direct sunlight. Keep away from heat and sources of ignition. Prevent moisture. Metal, glass should be isolated storage. "poison gas" signs should be affixed. Aviation, railway transportation is prohibited. When other combustibles on fire around, dry powder, carbon dioxide can be used to extinguish. Water can be used to cool cylinder, and then close the valve quickly.
| [First-aid steps]
It has eye irritation and can lead to blind, eyes should continue to be rinsed, go to the hospital fast for treatment. After corrosion, skin and mucous membranes is difficult to heal, it should be washed with water, and then coated with magnesium oxide ointment or glycerol dilute ammonia, and seek medical advice.
| [Category]
Compressed gas and liquefied.
| [Flammability hazard characteristics]
When meet water, it can decompose into toxic hydrogen fluoride gas and tungstate.
| [Storage characteristics]
Treasury ventilation low-temperature drying.
| [Extinguishing agent]
Water.
| [Occupational standards]
TLV-TWA 5 mg (tungsten)/cubic meter; STEL 10 mg (tungsten)/cubic meter. |
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