Tantaldisilicid Chemische Eigenschaften,Einsatz,Produktion Methoden
S-S?tze Betriebsanweisung:
S22:Staub nicht einatmen.
Chemische Eigenschaften
gray powder(s); used in the form of a 99.5%–99.95% pure material as a sputtering target in the fabrication of integrated circuits; there is also the compound Ta5Si3, 12067-56-0 [STR93] [CER91]
Verwenden
Tantalum disilicide is used in the preparation of ceramics, which finds application in the thermal protection systems.
Tantaldisilicid Upstream-Materialien And Downstream Produkte
Upstream-Materialien
Downstream Produkte