Identification | More | [Name]
Hexamethyldisilazane | [CAS]
999-97-3 | [Synonyms]
1,1,1,3,3,3-HEXAMETHYLDISILAZANE 1,1,1-Trimethyl-N-(trimethylsilyl)silanamine BIS(TRIMETHYLSILYL)AMINE HEXAMETHYLDISILAZANE hexamethyl disilizane HEXAMETHYLDISILYLAMINE HMDS LABOTEST-BB LT01408762 SILAZANE HMN ((CH3)3Si)2NH 1,1,1,3,3,3-hexamethyl-disilazan 1,1,1-trimethyl-n-(trimethylsilyl)-silanamin Disilazane, 1,1,1,3,3,3-hexamethyl- hexamethyldisilazane(hmds) hexamethylsilazane sz6079 Trimethyl-N-(trimethylsilyl)silanamine tsl8802 1,1,1,3,3,3-Hexamithyl disilazane (dimethyl-trimethylsilylamino-silyl)methane | [EINECS(EC#)]
213-668-5 | [Molecular Formula]
C6H19NSi2 | [MDL Number]
MFCD00008259 | [Molecular Weight]
161.39 | [MOL File]
999-97-3.mol |
Chemical Properties | Back Directory | [Appearance]
Colorless liquid | [Melting point ]
-78 °C
| [Boiling point ]
125 °C (lit.) | [density ]
0.774 g/mL at 25 °C(lit.)
| [vapor density ]
4.6 (vs air)
| [vapor pressure ]
20 hPa (20 °C) | [refractive index ]
n20/D 1.407(lit.)
| [Fp ]
57.2 °F
| [storage temp. ]
2-8°C
| [solubility ]
Miscible with acetone, benzene, ethyl ether, heptane and perchloroethylene. | [form ]
Liquid | [pka]
30(at 25℃) | [color ]
Colorless | [Specific Gravity]
0.774 | [Odor]
Ammonia odour | [PH Range]
8.5 | [explosive limit]
0.8-25.9%(V) | [Water Solubility ]
REACTS | [Hydrolytic Sensitivity]
7: reacts slowly with moisture/water | [Sensitive ]
Moisture Sensitive | [Merck ]
14,4689 | [BRN ]
635752 | [InChIKey]
FFUAGWLWBBFQJT-UHFFFAOYSA-N | [LogP]
0.23-1.19 at 20-25℃ | [CAS DataBase Reference]
999-97-3(CAS DataBase Reference) | [NIST Chemistry Reference]
Silanamine, 1,1,1-trimethyl-N-(trimethylsilyl)-(999-97-3) | [Storage Precautions]
Store under nitrogen;Moisture sensitive | [EPA Substance Registry System]
999-97-3(EPA Substance) |
Safety Data | Back Directory | [Hazard Codes ]
F,C,Xn | [Risk Statements ]
R11:Highly Flammable. R20/21/22:Harmful by inhalation, in contact with skin and if swallowed . R34:Causes burns. | [Safety Statements ]
S16:Keep away from sources of ignition-No smoking . S26:In case of contact with eyes, rinse immediately with plenty of water and seek medical advice . S36/37/39:Wear suitable protective clothing, gloves and eye/face protection . S45:In case of accident or if you feel unwell, seek medical advice immediately (show label where possible) . | [RIDADR ]
UN 3286 3/PG 2
| [WGK Germany ]
2
| [RTECS ]
JM9230000
| [F ]
21 | [Autoignition Temperature]
325 °C | [Hazard Note ]
Flammable | [TSCA ]
Yes | [HazardClass ]
3 | [PackingGroup ]
II | [HS Code ]
29319099 | [Hazardous Substances Data]
999-97-3(Hazardous Substances Data) | [Toxicity]
LDLO i.p. in mice: 650 mg/kg (Petrarch Systems Inc. Product Information Sheets) |
Hazard Information | Back Directory | [General Description]
A liquid. Boiling point of 260°F. Flash point 77°F. May be toxic by ingestion. Irritates skin and eyes. Vapors are heavier than air. May emit highly toxic nitrogen oxide fumes when heated to decomposition. Used to make other chemicals. | [Reactivity Profile]
HEXAMETHYL DISILAZANE(999-97-3) reacts with many carbonyl containing organic compounds to generate gaseous ammonia. May be incompatible with isocyanates, halogenated organics, peroxides, phenols (acidic), epoxides, anhydrides, and acid halides. Flammable gaseous hydrogen may be generated in combination with strong reducing agents, such as hydrides. | [Air & Water Reactions]
Highly flammable. Moisture sensitive. | [Hazard]
Flammable, moderate fire risk. | [Health Hazard]
Inhalation or contact with material may irritate or burn skin and eyes. Fire may produce irritating, corrosive and/or toxic gases. Vapors may cause dizziness or suffocation. Runoff from fire control or dilution water may cause pollution. | [Description]
Hexamethyldisilazane is a bulk organo silicon compound, being a quite useful silanizing agent. It is a reagent for the preparation of trimethylsilyl derivatives. It can also be used to dehydrate cells of biomaterials for scanning electron microscopy (SEM). Moreover, it is an adhesion promoter for photoresist in photolithography, and is also useful in the pyrolysis-gas chromatography-mass spectrometry to enhance the detectability of compounds with polar functional groups. | [Chemical Properties]
Colorless liquid | [Physical properties]
bp 125 °C; d 0.765 g cm?3. | [Uses]
A reagent for the preparation of trimethylsilyl derivatives. | [Uses]
Deactivation of chromatographic support materials. In electronic industry as an adhesion promoter for photoresists on silicon. | [Uses]
Hexamethyldisilazane mainly used as methyl silane alkylation (such as amikacin, penicillin, cephalosporins and kinds of penicillin derivatives), hydroxyl protectants of antibiotics.
It is used as surface treatment agent of diatomite, white carbon black, titanium and blond additives of photoresist in the semiconductor industry.
It is used as treatment agent of tearing strength resistance.
It is used as a solvent in organic synthesis and organometallic chemistry.
It is used as an adhesion promoter for photoresist in photolithography.
it is used for the preparation of trimethylsilyl ethers from hydroxy compounds.
It is used as an alternative to critical point drying during sample preparation in electron microscopy.
It is added to analyte to get silylated diagnostic products during pyrolysis in gas chromatography- mass spectrometry. | [Definition]
ChEBI: An N-silyl compound obtained from ammonia by replacement of two of the hydrogens with trimethylsilyl groups. Hexamethyldisilazane is a derivatisation agent used in gas chromatography mass spectrometry applications. | [Reactions]
Hexamethyldisilazane(HMDS) is an extremely versatile and strong silylating agent. It is primarily used for the protection of sensitive functional groups during chemical synthesis.One of the advantages of Hexamethyldisilazane over chlorosilanes is that no base is needed as a hydrochloric acid acceptor. It produces ammonia which escapes easily from the reaction mixture during silylation. | [Flammability and Explosibility]
Flammable | [reaction suitability]
reagent type: derivatization reagent reaction type: Silylations | [Synthesis]
A production method for hexamethyldisilazane comprises the following steps: trimethylsilyl chloride is added into a sealed reaction kettle with a bearing pressure higher than 0.5MPa, stirring is carried out, ammonia gas is introduced, the ammonia pressure in the reaction kettle is maintained at a value between 0.1MPa and 0.2MPa, the temperature is between 40 ℃ and 50 ℃, the reaction is carried out, and the ammonia gas quantity is gradually reduced till the stop; and then, the pressure is maintained at the unchanged value between 0.1MPa and 0.2MPa, the reaction is maintained for 0.5h to 2h, then, the temperature in the kettle is lowered to a value below 10 ℃, water with the temperature lower than 10 ℃ is added, the dissolution reaction is carried out to generate ammonia chloride, and upper layer materials are hexamethyldisilazane after the delamination.
| [Purification Methods]
A possible impurity is Me3SiCl. Wash it well with pet ether and fractionate it through a vacuum jacketed column packed with Helipac using a reflux ratio of 10:1. [Langer et al. J Org Chem 23 50 1958, Beilstein 4 IV 4014.] | [Toxics Screening Level]
The ITSL is 206 μg/m3, based on annual averaging time. | [References]
Deng, Xiang. "Hexamethyldisilazane." Synlett 2011.06(2011):881-882. Chiavari, G, D. Fabbri, and S. Prati. "Gas chromatographic-mass spectrometric analysis of products arising from pyrolysis of amino acids in the presence of hexamethyldisilazane." Journal of Chromatography A922.1–2(2001):235-241.
Nation, J. L. "A new method using hexamethyldisilazane for preparation of soft insect tissues for scanning electron microscopy." Stain Technology 58.6(1983):347-51.
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|
Well-known Reagent Company Product Information | Back Directory | [Acros Organics]
1,1,1,3,3,3-Hexamethyldisilazane, 98%(999-97-3) | [Alfa Aesar]
Hexamethyldisilazane, Electronic grade, 99+%(999-97-3) | [Sigma Aldrich]
999-97-3(sigmaaldrich) | [TCI AMERICA]
1,1,1,3,3,3-Hexamethyldisilazane,>96.0%(GC)(999-97-3) |
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