Identification | Back Directory | [Name]
DI(T-BUTYLAMINO)SILANE | [CAS]
186598-40-3 | [Synonyms]
DI(T-BUTYLAMINO)SILANE BTBAS: [NH(C4H9)]2SiH2 BIS(T-BUTYLAMINO)SILANE DI-(TERT-BUTYLAMINO)SILANE Bis(t-butylamino)silane BTBAS Bis(t-butylaMino)silane, 97+% BTBAS N,N'-Bis(1,1-dimethylethyl)silanediamine DI(T-BUTYLAMINO)SILANE ISO 9001:2015 REACH Silanediamine, N,N'-bis(1,1-dimethylethyl)- Dl(t-Butylamino)silane bis (tert-butylamino)silane Bis(t-butylamino)silane, BTBAS (99.999%-Si) PURATREM | [Molecular Formula]
C8H22N2Si | [MDL Number]
MFCD03411245 | [MOL File]
186598-40-3.mol | [Molecular Weight]
174.36 |
Hazard Information | Back Directory | [Uses]
Bis(t-butylamino)silane is a useful reagent, catalyst, and precursor. It is applicated in thin film deposition. Aminosilanes are the best choice as Si source for the deposition of hafnium silicates (HfSiO) and hafnium silicon oxynitrides (HfSiON). |
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