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Penta, N. K., Dandu Veera, P. R., & Babu, S. V. (2011).
Role of Poly(diallyldimethylammonium chloride) in Selective Polishing of Polysilicon over Silicon Dioxide and Silicon Nitride Films. Langmuir, 27(7), 3502–3510.
doi:10.1021/la104257k
10.1021/la104257k
