H,1H,2H,2H-Perfluorodecyltrichlorosilane, also known as FDTS, is a colorless liquid chemical with molecular formula C10H4Cl3F17Si. FDTS molecules form self-assembled monolayers. They bond onto surfaces terminated with hydroxyl (-OH) groups, such as glass, ceramics, or SiO2 forming a regular covalent bond. It anchors on oxide surfaces with its tricholoro-silane group and attaches covalently
1H,1H,2H,2H-Perfluorodecyltrichlorosilane (FDTS) monolayer is often applied to movable microparts of microelectromechanical systems (MEMS). A FDTS monolayer reduces surface energy and prevents sticking, so they are used to coat micro- and nano-features on stamps for a nanoimprint lithography which is becoming a method of choice for making electronics, organic photodiodes, microfluidics and other. Reduced surface energy is helpful for reduction of ejection force and demolding of polymer parts in an injection molding and 1H,1H,2H,2H-Perfluorodecyltrichlorosilane (FDTS) coating was applied onto some metallic injection molding molds and inserts. Further, it is used to coat micro-nano features on stamps for a nano imprint lithography. In addition, it is used in the preparation of other products by reacting with methanol.